SEM Sentinel : SEM performance measurement system / Alice V. Ling [and others].
| Other author/creator | Ling, Alice V. (Alice Valeria) |
| Other author/creator | National Institute of Standards and Technology (U.S.) |
| Format | Book and Microform |
| Publication Info | Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2000-] |
| Description | volumes : illustrations ; 28 cm. |
| Subject(s) |
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| Variant title | Scanning electron microscope Sentinel |
| Portion of title | SEM performance measurement system |
| Variant title | Scanning electron microscope performance measurement system |
| Series | NISTIR NISTIR. ^A682451 |
| General note | "April 2000"--Pt. 1. |
| General note | Shipping list no.: 2000-0860-M (Pt. 1) |
| Bibliography note | Includes bibliographical references. |
| Special numbering | Issued in parts. |
| Reproduction note | Joyner- Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [2000- microfiches : negative. |
| GPO item number | 0247-D (MF) |
| Govt. docs number | C 13.58: |
Available Items
| Library | Location | Call Number | Status | Item Actions | |
| Joyner | Microforms B300 | C 13.58 | ✔ Available |